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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 25915.15-2022 |
Clean rooms and related controlled environments - Part 15: Suitability assessment of equipment and materials by concentration of gaseous chemicals {译} 洁净室及相关受控环境 第15部分： 按气态化学物浓度评定设备及材料的适用性 |
China National Standards Clean rooms related |
 English PDF |
| GB/T 25915.14-2022 |
Clean rooms and related controlled environments - Part 14: Assessment of equipment suitability by particle concentration {译} 洁净室及相关受控环境 第14部分：按粒子浓度评估设备适用性 |
China National Standards Clean rooms related |
English PDF |
| GB/T 25915.13-2022 |
Cleanrooms and related controlled environments - Part 13: Surface cleaning to particle and chemical cleanliness requirements {译} 洁净室及相关受控环境 第13部分：达到粒子和化学洁净度要求的表面清洁 |
China National Standards Clean rooms related |
English PDF |
| GB/T 25915.2-2021 |
Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 洁净室及相关受控环境 第2部分：洁净室空气粒子浓度的监测 |
China National Standards Clean rooms related |
English PDF |
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