Standard Code | Standard Title | Standard Class | Order |
---|---|---|---|
GB/T 43493.3-2023 |
Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 3: Photoluminescence detection method of defects {译} 半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第3部分:缺陷的光致发光检测方法 |
China National Standards Detection silicon wafer |
English PDF |
GB/T 43493.2-2023 |
Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 2: Optical detection methods for defects {译} 半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第2部分:缺陷的光学检测方法 |
China National Standards Detection silicon wafer |
English PDF |
GB/T 43315-2023 |
Detection of silicon wafer flow pattern defects Corrosion method {译} 硅片流动图形缺陷的检测 腐蚀法 |
China National Standards Detection silicon wafer |
English PDF |
GB/T 4058-2009 |
Test method for detection of oxidation induced defects in polished silicon wafers 硅抛光片氧化诱生缺陷的检验方法 |
China National Standards Detection silicon wafer |
English PDF |
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