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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 42721-2023 |
Electronic special gas nitric oxide {译} 电子特气 一氧化氮 |
China National Standards Electronic special gas |
 English PDF |
| GB/T 42720-2023 |
Electronic special gas hexachlorodisilane {译} 电子特气 六氯乙硅烷 |
China National Standards Electronic special gas |
English PDF |
| GB/T 40418-2021 |
Electronic specialty gas—Fluoromethane 电子特气 氟甲烷 |
China National Standards Electronic special gas |
English PDF |
| GB/T 40417-2021 |
Electronic specialty gas—1,3-Hexafluorobutadiene 电子特气 六氟丁二烯 |
China National Standards Electronic special gas |
English PDF |
| GB/T 17874-2021 |
Electronic specialty gas—Boron trichloride 电子特气 三氯化硼 |
China National Standards Electronic special gas |
English PDF |
| GB/T 21287-2021 |
Electronic specialty gas—Nitrogen trifluoride 电子特气 三氟化氮 |
China National Standards Electronic special gas |
English PDF |
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