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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 25188-2010 |
Thickness measurements for ultrathin silicon oxide layers on silicon wafers X-ray photoelectron spectroscopy 硅晶片表面超薄氧化硅层厚度的测量 X射线光电子能谱法 |
China National Standards Thickness measurements ultrathin |
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