China National Standards

China noncontact GB Standards List


  •  China "noncontact" GB Standards List:
  • Standard  Code Standard Title Standard Class Order
    GB/T 6620-2009 Test method for measuring warp on silicon slices by noncontact scanning
    硅片翘曲度非接触式测试方法
    China National Standards
    noncontact

    English PDF
    GB/T 6616-2009 Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
    半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法
    China National Standards
    noncontact

    English PDF
    GB/T 19922-2005 Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
    硅片局部平整度非接触式标准测试方法
    China National Standards
    noncontact

    English PDF

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