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  •  China "MEMS" GB Standards List:
  • Standard  Code GB Standard Title Standard Class Order
  • GB/T 34900-2017
  • Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer MEMS
    China National Standards
  • GB/T 34894-2017
  • Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer MEMS
    China National Standards
  • GB/T 34898-2017
  • Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element MEMS
    China National Standards
  • GB/T 34899-2017
  • Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy MEMS
    China National Standards
  • GB/T 34893-2017
  • Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer MEMS
    China National Standards
  • GB/T 33922-2017
  • Wafer level test methods for MEMS piezoresistive pressure-sensitive die performances MEMS
    China National Standards
  • GB/T 33929-2017
  • Test methods of the performance for MEMS high g accelerometer MEMS
    China National Standards
  • GB/T 32815-2016
  • Silicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process MEMS
    China National Standards
  • GB/T 32816-2016
  • Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bonding process MEMS
    China National Standards
  • GB/T 32814-2016
  • Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process MEMS
    China National Standards
  • GB/T 32817-2016
  • Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS MEMS
    China National Standards
  • JJF 1535-2015
  • Calibration Specification for MEMS Gyroscopes MEMS
    China Metrological Standards
  • JJF 1427-2013
  • Calibration Specification for MEMS Linear Accelerometers MEMS
    China Metrological Standards
  • GB/T 28276-2012
  • Silicon-based MEMS fabrication technology - Specification for the dissolved wafer process MEMS
    China National Standards
  • GB/T 28277-2012
  • Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area MEMS
    China National Standards
  • GB/T 28274-2012
  • Silicon-based MEMS fabrication technology - The basic regulation of layout design MEMS
    China National Standards
  • GB/T 28275-2012
  • Silicon-based MEMS fabrication technology - Specification for KOH etch process MEMS
    China National Standards
  • GB/T 26112-2010
  • Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters MEMS
    China National Standards
  • GB/T 26113-2010
  • Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters MEMS
    China National Standards
  • GB/T 26111-2010
  • Micro-electromechanical system technology - Terms MEMS
    China National Standards
  • GB/T 14006.2-1997
  • Outline diMEMSions of transformers and inductors for use in telecommunication and electronic equipmemt--Part 2:Transformers and inductors using YEx-2 laminations for printed wiring boardmounting MEMS
    China National Standards

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