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Standard Code | Standard Title | Standard Class | Order |
---|---|---|---|
GB/T 30652-2023 |
Trichlorosilane for silicon epitaxy 硅外延用三氯氢硅 |
China National Standards Trichlorosil |
English PDF |
GB/T 28654-2018 |
Trichlorosilane for industrial use 工业三氯氢硅 |
China National Standards Trichlorosil |
English PDF |
GB/T 35498-2017 |
VinylTrichlorosilane for industrial use 工业用乙烯基三氯硅烷 |
China National Standards Trichlorosil |
English PDF |
GB/T 30652-2014 |
Trichlorosilane for silicon epitaxial 硅外延用三氯氢硅 |
China National Standards Trichlorosil |
English PDF |
GB/T 30302-2013 |
PhenylTrichlorosilane for industial use 工业用苯基三氯硅烷 |
China National Standards Trichlorosil |
English PDF |
GB/T 29056-2012 |
Trichlorosilane for silicon epitaxy - Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,molybdenum,arsenic and antimony content - Inductively coupled plasma mass spectrometric method 硅外延用三氯氢硅化学分析方法 硼、铝、磷、钒、铬、锰、铁、钴、镍、铜、钼、砷和锑量的测定 电感耦合等离子体质谱法 |
China National Standards Trichlorosil |
English PDF |
GB 28654-2012 |
Trichlorosilane for industrial use 工业三氯氢硅 |
China National Standards Trichlorosil |
English PDF |
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