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GB/T 44517-2024  China national standard english version:

　
GB
中华人民共和国国家标准
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 44517-2024

Microelectromechanical systems (MEMS) technology - Wafer curvature and cantilever beam deflection test methods for residual stress of MEMS membranes
微机电系统（MEMS）技术-MEMS膜残余应力的晶圆曲率和悬臂梁挠度试验方法
Issued Date:2024/9/29 　 Implemented Date:2025/4/1
Issued by: 　 The Standardization Administration of the People's Republic of China
　

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GB Standard Code GB/T 44517-2024
Standard Category China National Standards
GB Standard English Title Microelectromechanical systems (MEMS) technology - Wafer curvature and cantilever beam deflection test methods for residual stress of MEMS membranes{译}
GB Standard Chinese Title 微机电系统（MEMS）技术-MEMS膜残余应力的晶圆曲率和悬臂梁挠度试验方法
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  • Relational GB standards of GB/T 44517-2024     Keywords: Microelectromechanical systems MEMS technology Wafer curvature cantilever ...
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