Standard Code | Standard Title | Standard Class | Order |
---|---|---|---|
GB/T 30868-2025 |
Microtube Density Test Method for Silicon Carbide Single Wafers {译} 碳化硅单晶片微管密度测试方法 |
China National Standards Microtube Density Test |
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GB/T 43313-2023 |
Testing of surface quality and microtube density of polished silicon carbide wafers by confocal differential interference method {译} 碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法 |
China National Standards Microtube Density Test |
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