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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 30868-2014 |
Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching 碳化硅单晶片微管密度的测定 化学腐蚀法 |
China National Standards wafers―Chemically |
 English PDF |
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